Principles of plasma discharges and materials processing
Lieberman, Michael A.
Principles of plasma discharges and materials processing - 2nd ed. - Hoboken, N.J. : Wiley-Interscience, c2005. - xxxv, 757 p. :
9780471720010
Plasma dynamics.
Thin films--Surfaces.
Plasma etching.
Plasma chemistry--Industrial applications.
530.44 / LIE/P
Principles of plasma discharges and materials processing - 2nd ed. - Hoboken, N.J. : Wiley-Interscience, c2005. - xxxv, 757 p. :
9780471720010
Plasma dynamics.
Thin films--Surfaces.
Plasma etching.
Plasma chemistry--Industrial applications.
530.44 / LIE/P