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MEMS :

MEMS : Fundamental Technology and Applications / edited by Vikas Choudhary and Krzysztof Iniewski. - xxii, 456 p. - Devices, circuits, and systems .

ISBN: 9781466515819

Subjects--Topical Terms:
Microelectromechanical systems.
Microelectronic packaging.

Dewey Class. No.: 621.381 / CHO/M

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