TY - BOOK AU - Yoshizawa, Toru TI - Handbook of Optical Metrology: Principles and Applications SN - 9781315215952 U1 - 681.25 PY - 2015/// CY - Boca Raton PB - CRC Press KW - Optical measurements KW - Handbooks, manuals, etc KW - Metrology KW - Electronic books KW - lcsh N1 - Includes bibliographical references and index; section 1. Fundamentals of optical elements and devices -- section 2. Fundamentals of principles and techniques for metrology -- section 3. Practical applications; Also available in print format UR - http://marc.crcnetbase.com/isbn/9781466573611 ER -