Ghandhi, Sorab K. <br/><br/>
VLSI Fabrication Principles:  Silicon and Gallium Arsenide/ 
Sirab K. Ghandhi. 
 - 2nd ed. 
 - New Delhi:  Wiley,  c1994. 
 - xxiv, 834p. 
<br/><br/><label>ISBN: </label>9788126517909 
<br/><br/><label>Dewey Class. No.: </label>621.38171  / GHA/V