Hsu, Tai-Ran. <br/><br/>
Mems and Microsystems:  Design and Manufacture/ 
Tai-Ran Hsu 
 - New Delhi:  McGraw Hill,  c2002. 
 - xii, 436p. 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Dewey Class. No.: </label>621.381   / HSU/M