Chen, Francis F. <br/><br/>
Lecture notes on principles of plasma processing / 
F. F. Chen and J. P. Chang 
 - New York:  Kluwer Academic/Plenum Publishers,  ©2003 
 - ix, 208p. 
<br/><br/><label>ISBN: </label>9780306474972 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering.<br/>Plasma chemistry.<br/>Plasma dynamics.
<br/><br/><label>Dewey Class. No.: </label>621.044  / CHE/L