TY  - BOOK
AU  - Chen,Francis F.
AU  - Chang,Jane P.
TI  - Lecture notes on principles of plasma processing
SN  - 9780306474972
U1  - 621.044 
PY  - 2003///
CY  - New York
PB  - Kluwer Academic/Plenum Publishers
KW  - Plasma engineering
KW  - Plasma chemistry
KW  - Plasma dynamics
ER  -