Lieberman, Michael A. <br/><br/>
Principles of plasma discharges and materials processing 

 - 2nd ed. 
 - Hoboken, N.J. :  Wiley-Interscience,  c2005. 
 - xxxv, 757 p. : 
<br/><br/><label>ISBN: </label>9780471720010 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma dynamics.<br/>Thin films--Surfaces.<br/>Plasma etching.<br/>Plasma chemistry--Industrial applications.
<br/><br/><label>Dewey Class. No.: </label>530.44  / LIE/P