Plummer, James D.

Silicon VLSI technology : fundamentals, practice, and modeling / James D. Plummer, Michael Deal, Peter B. Griffin. - Upper Saddle River, NJ : Prentice Hall, 2010 - xiv, 817 p. : - Prentice Hall electronics and VLSI series .

9788131726044


Integrated circuits--Very large scale integration--Design and construction.
Silicon.
Silicon oxide films.
Metal oxide semiconductors.
Silicon-on-insulator technology.

621.395 / PLU/S