TY  - BOOK
AU  - Plummer,James D.
AU  - Deal,Michael D.
AU  - Griffin,Peter B.
TI  - Silicon VLSI technology: fundamentals, practice, and modeling 
SN  - 9788131726044
U1  - 621.395 
PY  - 2010///
CY  - Upper Saddle River, NJ
PB  - Prentice Hall
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Silicon
KW  - Silicon oxide films
KW  - Metal oxide semiconductors
KW  - Silicon-on-insulator technology
ER  -