MEMS :  Fundamental Technology and Applications / 
edited by Vikas Choudhary and Krzysztof Iniewski. 
 - xxii, 456 p. 
 - Devices, circuits, and systems .
<br/><br/><label>ISBN: </label>9781466515819 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microelectronic packaging.
<br/><br/><label>Dewey Class. No.: </label>621.381  / CHO/M