TY  - BOOK
AU  - Choudhary,Vikas
AU  - Iniewski,Krzysztof
TI  - MEMS: Fundamental Technology and Applications 
T2  - Devices, circuits, and systems
SN  - 9781466515819
U1  - 621.381 
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
ER  -