Geng, Hwaiyu <br/><br/>
Semiconductor Manufacturing Handbook /  
Hwaiyu Geng 
 - 2nd Ed. 
 - USA;  McGraw-Hill :  ©2018 
 - xxi, 525p. 
<br/><br/><label>ISBN: </label>9781265943424 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor Manufacturing<br/>Semiconductor Fabrication<br/>Semiconductor Technology
<br/><br/><label>Dewey Class. No.: </label>621.38152  / GenS2