TY  - GEN
AU  - Geng, Hwaiyu
TI  - Semiconductor Manufacturing Handbook / 
SN  - 9781265943424
U1  - 621.38152 
PY  - 2018///
CY  - USA
PB  - McGraw-Hill
KW  - Semiconductor Manufacturing
KW  - Semiconductor Fabrication
KW  - Semiconductor Technology
ER  -