Makabe,Toshiaki  <br/><br/>
Plasma Electronics :   Applications in Microelectronic Device Fabrication [2nd ed.] / 
Toshiaki Makabe and Zoran Lj.Petrovic 
 - 2nd ed. 
 - Newyork :  CRC Press,  ©2015 
 - xxxiii, 369p. 
<br/><br/><label>ISBN: </label>9781482222050 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma Electronics
<br/><br/><label>Dewey Class. No.: </label>621.044  / MakP