TY  - BOOK
AU  - Makabe,Toshiaki 
AU  - Petrovic, Zoran Lj
TI  - Plasma Electronics : : Applications in Microelectronic Device Fabrication [2nd ed.] 
SN  - 9781482222050
U1  - 621.044 
PY  - 2015///
CY  - Newyork
PB  - CRC Press
KW  - Plasma Electronics
ER  -