Liu, Chang <br/><br/>
Foundation of MEMS 
Chang Liu, Vaishali B. Mungurwadi and Anil V. Nandi 
 - Harlow  Pearson  ©2012. 
 - 577p. 
<br/><br/>Contact Library (library@iittp.ac.in) for the access code and further assistance 
<br/><br/><label>ISBN: </label>9781292013985 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Micro Electro Mechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.3  / LIU/F