TY  - BOOK
AU  - Liu, Chang
AU  - Mungurwadi, Vaishali B.
AU  - Nandi, Anil V.
TI  - Foundation of MEMS
SN  - 9781292013985
U1  - 621.3 
PY  - 2012///
CY  - Harlow
PB  - Pearson
KW  - Micro Electro Mechanical systems
N1  - Contact Library (library@iittp.ac.in) for the access code and further assistance
UR  - https://ebooks.elibrary.in.pearson.com/wr/pdfviewer.html?version=1.0.315.1?subscriptionId=17ccf959-709e-4ec4-95c4-348a92f4a33b#book/e06d80a8-cf75-41bb-95fb-2c0df0524ce1
ER  -