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MEMS : Fundamental Technology and Applications /

By: Material type: TextTextSeries: Devices, circuits, and systemsPublication details: Boca Raton : Taylor & Francis, c2013.Description: 478 p. : 369 B/W IllustrationsISBN:
  • 9781315216393
Subject(s): Genre/Form: Additional physical formats: No titleDDC classification:
  • 621.381 M533
Online resources: Available additional physical forms:
  • Also available in print edition.
Contents:
section 1. Breakthrough technology -- section 2. MEMS-based novel applications.
Summary: Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems-- Provided by publisher.
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Item type Current library Call number Status Barcode
E-Books E-Books Indian Institute of Technology Tirupati 621.381 M533 (Browse shelf(Opens below)) Available EB00357

Includes bibliographical references and index.

section 1. Breakthrough technology -- section 2. MEMS-based novel applications.

Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems-- Provided by publisher.

Also available in print edition.

Mode of access: World Wide Web.

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