000			01982cam a2200373Ia 4500
001			CRC0KE16714PDF
003			FlBoTFG
005			20230512171734.0
006			m o d
007			cr cn
008			130725s2013 fluad ob 001 0 eng d
020			_a9781315216393
035			_a(OCoLC)849918860
040			_aFlBoTFG _cFlBoTFG
082			_a621.381 _bM533
090			_aTK7875 _b.M457 2013
100			_aChoudhary, Vikas and Iniewski, Krzysztof.
245	0	0	_aMEMS : _bFundamental Technology and Applications /
260			_aBoca Raton : _bTaylor & Francis, _cc2013.
300			_a478 p. : _b369 B/W Illustrations
490	1		_aDevices, circuits, and systems
504			_aIncludes bibliographical references and index.
505	0		_asection 1. Breakthrough technology -- section 2. MEMS-based novel applications.
520			_aWritten by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems-- _cProvided by publisher.
530			_aAlso available in print edition.
538			_aMode of access: World Wide Web.
650		0	_aMicroelectromechanical systems.
650		0	_aMicroelectronic packaging.
655		7	_aElectronic books. _2lcsh
776	1		_z9781466515819 (hardback)
830		0	_aDevices, circuits, and systems.
856	4	0	_uhttp://marc.crcnetbase.com/isbn/9781466515826 _qebook
942			_2ddc _cEBK
999			_c1049 _d1049