| 000 | 00417nam a22001577a 4500 | ||
|---|---|---|---|
| 999 |
_c267 _d267 |
||
| 005 | 20220620174509.0 | ||
| 008 | 161013b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780070487093 | ||
| 041 | _aeng | ||
| 082 |
_a621.381 _bHSU/M |
||
| 100 | _aHsu, Tai-Ran. | ||
| 245 |
_aMems and Microsystems: _bDesign and Manufacture/ _cTai-Ran Hsu |
||
| 260 |
_aNew Delhi: _bMcGraw Hill, _cc2002. |
||
| 300 | _axii, 436p. | ||
| 942 | _cBK | ||