| 000 | 00593cam a22002054a 4500 | ||
|---|---|---|---|
| 005 | 20250702164938.0 | ||
| 008 | 021030s2003 nyua b 001 0 eng | ||
| 020 | _a9780306474972 | ||
| 041 | _aeng | ||
| 082 | 0 | 0 |
_a621.044 _bCHE/L |
| 100 | 1 | _aChen, Francis F. | |
| 245 | 1 | 0 |
_aLecture notes on principles of plasma processing / _cF. F. Chen and J. P. Chang |
| 260 |
_aNew York: _bKluwer Academic/Plenum Publishers, _c©2003 |
||
| 300 | _aix, 208p. | ||
| 650 | 0 | _aPlasma engineering. | |
| 650 | 0 | _aPlasma chemistry. | |
| 650 | 0 | _aPlasma dynamics. | |
| 700 | 1 | _aChang, Jane P. | |
| 942 | _cBK | ||
| 999 |
_c3463 _d3463 |
||