000			00867cam a22002534a 4500
999			_c4043 _d4043
005			20211208120829.0
008			990726s2000 njua b 001 0 eng
020			_a9788131726044
041			_aeng
082	0	0	_a621.395 _bPLU/S
100	1		_aPlummer, James D.
245	1	0	_aSilicon VLSI technology : _bfundamentals, practice, and modeling / _cJames D. Plummer, Michael Deal, Peter B. Griffin.
260			_aUpper Saddle River, NJ : _bPrentice Hall, _c2010
300			_axiv, 817 p. :
440		0	_aPrentice Hall electronics and VLSI series
650		0	_aIntegrated circuits _xVery large scale integration _xDesign and construction.
650		0	_aSilicon.
650		0	_aSilicon oxide films.
650		0	_aMetal oxide semiconductors.
650		0	_aSilicon-on-insulator technology.
700	1		_aDeal, Michael D.
700	1		_aGriffin, Peter B.
942			_cBK