| 000 | 00587cam a2200193 i 4500 | ||
|---|---|---|---|
| 999 |
_c497 _d497 |
||
| 005 | 20220708150242.0 | ||
| 008 | 130123t20132013flua b 001 0 eng | ||
| 020 | _a9781466515819 | ||
| 041 | _aeng | ||
| 082 | 0 | 0 |
_a621.381 _bCHO/M |
| 245 | 0 | 0 |
_aMEMS : _bFundamental Technology and Applications / _cedited by Vikas Choudhary and Krzysztof Iniewski. |
| 300 | _axxii, 456 p. | ||
| 490 | 0 | _aDevices, circuits, and systems | |
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aMicroelectronic packaging. | |
| 700 | 1 | _aChoudhary, Vikas. | |
| 700 | 1 | _aIniewski, Krzysztof | |
| 942 | _cBK | ||