| 000 | 00537 a2200193 4500 | ||
|---|---|---|---|
| 005 | 20250602111834.0 | ||
| 008 | 250527b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9781265943424 | ||
| 082 |
_a621.38152 _bGenS2 |
||
| 100 | _aGeng, Hwaiyu | ||
| 245 |
_aSemiconductor Manufacturing Handbook / _cHwaiyu Geng |
||
| 250 | _a2nd Ed. | ||
| 260 |
_bMcGraw-Hill : _aUSA; _c©2018 |
||
| 300 | _axxi, 525p. | ||
| 650 | _aSemiconductor Manufacturing | ||
| 650 | _aSemiconductor Fabrication | ||
| 650 | _aSemiconductor Technology | ||
| 942 | _cBK | ||
| 999 |
_c7310 _d7310 |
||