| 000 | 00578nam a2200193 4500 | ||
|---|---|---|---|
| 005 | 20251212165201.0 | ||
| 008 | 251011b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9781482222050 | ||
| 041 | _aeng | ||
| 082 |
_a621.044 _bMakP |
||
| 100 | _aMakabe,Toshiaki | ||
| 245 |
_aPlasma Electronics : _bApplications in Microelectronic Device Fabrication [2nd ed.] / _cToshiaki Makabe and Zoran Lj.Petrovic |
||
| 250 | _a2nd ed. | ||
| 260 |
_aNewyork : _bCRC Press, _c©2015 |
||
| 300 | _axxxiii, 369p. | ||
| 650 | _aPlasma Electronics | ||
| 700 | _aPetrovic, Zoran Lj | ||
| 942 | _cBK | ||
| 999 |
_c7404 _d7404 |
||