| 000 | 00814nam a2200217 4500 | ||
|---|---|---|---|
| 005 | 20250912145905.0 | ||
| 008 | 250911b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9781292013985 | ||
| 041 | _aeng | ||
| 082 |
_a621.3 _bLIU/F |
||
| 100 | _aLiu, Chang | ||
| 245 |
_aFoundation of MEMS _cChang Liu, Vaishali B. Mungurwadi and Anil V. Nandi |
||
| 260 |
_aHarlow _bPearson _c©2012. |
||
| 300 | _a577p. | ||
| 505 | _aContact Library (library@iittp.ac.in) for the access code and further assistance | ||
| 650 | _aMicro Electro Mechanical systems | ||
| 700 | _aMungurwadi, Vaishali B. | ||
| 700 | _aNandi, Anil V. | ||
| 856 | _uhttps://ebooks.elibrary.in.pearson.com/wr/pdfviewer.html?version=1.0.315.1?subscriptionId=17ccf959-709e-4ec4-95c4-348a92f4a33b#book/e06d80a8-cf75-41bb-95fb-2c0df0524ce1 | ||
| 942 | _cEBK | ||
| 999 |
_c7467 _d7467 |
||