Lecture notes on principles of plasma processing /
Chen, Francis F.
Lecture notes on principles of plasma processing / F. F. Chen and J. P. Chang - New York: Kluwer Academic/Plenum Publishers, ©2003 - ix, 208p.
9780306474972
Plasma engineering.
Plasma chemistry.
Plasma dynamics.
621.044 / CHE/L
Lecture notes on principles of plasma processing / F. F. Chen and J. P. Chang - New York: Kluwer Academic/Plenum Publishers, ©2003 - ix, 208p.
9780306474972
Plasma engineering.
Plasma chemistry.
Plasma dynamics.
621.044 / CHE/L