Lecture notes on principles of plasma processing / (Record no. 3463)

MARC details
000 -LEADER
fixed length control field 00593cam a22002054a 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20250702164938.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 021030s2003 nyua b 001 0 eng
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9780306474972
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title eng
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.044
Item number CHE/L
100 1# - MAIN ENTRY--AUTHOR NAME
Personal name Chen, Francis F.
245 10 - TITLE STATEMENT
Title Lecture notes on principles of plasma processing /
Statement of responsibility, etc F. F. Chen and J. P. Chang
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication New York:
Name of publisher Kluwer Academic/Plenum Publishers,
Year of publication ©2003
300 ## - PHYSICAL DESCRIPTION
Number of Pages ix, 208p.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Plasma engineering.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Plasma chemistry.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Plasma dynamics.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Chang, Jane P.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Books
Holdings
Withdrawn status Lost status Damaged status Collection code Home library Current library Shelving location Date acquired Source of acquisition Purchase Price Bill number Full call number Accession Number Print Price Bill Date/Price effective from Koha item type
      Physics Indian Institute of Technology Tirupati Indian Institute of Technology Tirupati General Stacks 20/05/2020 The Book Syndicate 6621.08 BS/39920 621.044 CHE/L 06786 10962.45 09/03/2020 Books
      Physics Indian Institute of Technology Tirupati Indian Institute of Technology Tirupati General Stacks 20/05/2020 The Book Syndicate 6621.08 BS/39920 621.044 CHE/L 06787 10962.45 09/03/2020 Books
      Physics Indian Institute of Technology Tirupati Indian Institute of Technology Tirupati Reference 18/12/2020   7462.46 187/20-21 REF 621.044 CheL 07068 11480.72 17/11/2020 Reference