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Plasma Electronics : Applications in Microelectronic Device Fabrication [2nd ed.] /

Makabe,Toshiaki

Plasma Electronics : Applications in Microelectronic Device Fabrication [2nd ed.] / Toshiaki Makabe and Zoran Lj.Petrovic - 2nd ed. - Newyork : CRC Press, ©2015 - xxxiii, 369p.

ISBN: 9781482222050

Subjects--Topical Terms:
Plasma Electronics

Dewey Class. No.: 621.044 / MakP

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