Plasma Electronics : Applications in Microelectronic Device Fabrication [2nd ed.] / Toshiaki Makabe and Zoran Lj.Petrovic
Material type:
TextLanguage: English Publication details: Newyork : CRC Press, ©2015Edition: 2nd edDescription: xxxiii, 369pISBN: - 9781482222050
- 621.044Â MakP
| Item type | Current library | Collection | Call number | Copy number | Status | Barcode | |
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Books
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Indian Institute of Technology Tirupati General Stacks | Physics | 621.044 MakP2 (11934) (Browse shelf(Opens below)) | Copy 01 | Available | 11934 |
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