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Plasma Electronics : Applications in Microelectronic Device Fabrication [2nd ed.] / Toshiaki Makabe and Zoran Lj.Petrovic

By: Contributor(s): Material type: TextTextLanguage: English Publication details: Newyork : CRC Press, ©2015Edition: 2nd edDescription: xxxiii, 369pISBN:
  • 9781482222050
Subject(s): DDC classification:
  • 621.044 MakP
List(s) this item appears in: New Arrivals 01-15 December 2025, Vol. 06, Issue 32
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Item type Current library Collection Call number Copy number Status Barcode
Books Books Indian Institute of Technology Tirupati General Stacks Physics 621.044 MakP2 (11934) (Browse shelf(Opens below)) Copy 01 Available 11934

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